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Opt Express. 2011 Jun 6;19(12):11220-7. doi: 10.1364/OE.19.011220.

Thermo-optical tunable planar ridge microdisk resonator in silicon-on-insulator.

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1
Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore, Singapore. songjf@ime.a-star.edu.sg

Abstract

In this work, we design and demonstrate planar ridge microdisk resonators in silicon-on-insulator, which assemble the advantages of microring and microdisk resonators. The dependences of resonator optical modes on the slab thickness and the waveguide-to-resonator coupling gap are investigated. The highest Q-factor obtained is ~4 × 10(5). Using the thermo-optical effect, we attain a resonance wavelength tuning efficiency of ~66.5 pm/mW. We also compare the transmission spectra measured by using wavelength-scanning method and voltage-scanning method and show potential application for the adopted voltage-scanning method.

PMID:
21716351
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