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Appl Opt. 1994 Nov 1;33(31):7435-8. doi: 10.1364/AO.33.007435.

Optical-standard surfaces of single-crystal silicon for calibrating ellipsometers and reflectometers.

Abstract

We show that hydrogen-terminated (111) Si wafers prepared with NH(4)F-based treatments can serve as a calibration standard for ellipsometers and reflectometers.

PMID:
20941306
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