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Opt Lett. 2009 Mar 15;34(6):818-20.

Broadband multilayer-coated normal incidence blazed grating with approximately 10% diffraction efficiency through the 13-16 nm wavelength region.

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State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, China.


Diffraction gratings used in extreme UV are typically coated with periodic multilayer thin films. These coatings have a small bandwidth, thus leading to a narrow usable spectral region of multilayer gratings. Well-designed aperiodic multilayer coatings could provide high reflectivity over a much broader wavelength region, so they could broaden the usable spectral region of multilayer gratings. We designed and deposited an aperiodic Mo/Si multilayer coating onto a blazed grating substrate. At an incidence angle of 10 degrees, the -2nd-order diffraction efficiency of the multilayer grating is approximately 10% through the wavelength range of 13-16 nm.


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