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Appl Opt. 2005 Nov 10;44(32):6861-8.

Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer.

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Optical Sciences Center, University of Arizona, Tucson, Arizona 85721, USA.


Recent technological innovations have enabled the development of a new class of dynamic (vibration-insensitive) interferometer based on a CCD pixel-level phase-shifting approach. We present theoretical and experimental results for an interferometer based on this pixelated phase-shifting technique. Analyses of component errors and instrument functionality are presented. We show that the majority of error sources cause relatively small magnitude peak-to-valley errors in measurement of the order of 0.002-0.005lambda. These errors are largely mitigated by high-rate data acquisition and consequent data averaging.

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