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Items: 1 to 20 of 108

1.

Fabrication of a high-precision spherical micromirror by bending a silicon plate with a metal pad.

Wu T, Hane K.

Appl Opt. 2011 Sep 20;50(27):5321-8. doi: 10.1364/AO.50.005321.

PMID:
21947053
2.

Spherical silicon micromirrors bent by anodic bonding.

Wu T, Yamasaki T, Hokari R, Hane K.

Opt Express. 2011 Jun 6;19(12):11897-905. doi: 10.1364/OE.19.011897.

PMID:
21716423
3.
4.

Fabrication of concave silicon micro-mirrors.

Ow YS, Breese MB, Azimi S.

Opt Express. 2010 Jul 5;18(14):14511-8. doi: 10.1364/OE.18.014511.

PMID:
20639936
5.

Silicon microlens structures fabricated by scanning-probe gray-scale oxidation.

Chen CF, Tzeng SD, Chen HY, Gwo S.

Opt Lett. 2005 Mar 15;30(6):652-4.

PMID:
15792006
6.

Fabrication of concave spherical microlenses on silicon by femtosecond laser irradiation and mixed acid etching.

Pan A, Gao B, Chen T, Si J, Li C, Chen F, Hou X.

Opt Express. 2014 Jun 16;22(12):15245-50. doi: 10.1364/OE.22.015245.

PMID:
24977615
7.

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique.

Kao PH, Dai CL, Hsu CC, Wu CC.

Sensors (Basel). 2009;9(8):6219-31. doi: 10.3390/s90806219. Epub 2009 Aug 6.

8.
9.

Hybrid plasma bonding for void-free strong bonded interface of silicon/glass at 200 degrees C.

Howlader MM, Kibria MG, Zhang F, Kim MJ.

Talanta. 2010 Jul 15;82(2):508-15. doi: 10.1016/j.talanta.2010.05.001. Epub 2010 May 11.

PMID:
20602928
10.

Improved geometry of double-sided polished parallel wafers prepared for direct wafer bonding.

Haisma J, van der Kruis FJ, Spierings BA, Baalbergen JJ, Bijsterveld BH, Brehm R, Faasen JH, Groenen JJ, de Haas PW, Haddeman TB, Michielsen TM, Vijfvinkel J.

Appl Opt. 1994 Dec 1;33(34):7945-54. doi: 10.1364/AO.33.007945.

PMID:
20963009
11.

Observation of free surface-induced bending upon nanopatterning of ultrathin strained silicon layer.

Moutanabbir O, Reiche M, Zakharov N, Naumann F, Petzold M.

Nanotechnology. 2011 Jan 28;22(4):045701. doi: 10.1088/0957-4484/22/4/045701. Epub 2010 Dec 15.

PMID:
21157010
12.

Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation.

Teo EJ, Bettiol AA, Yang P, Breese MB, Xiong BQ, Mashanovich GZ, Headley WR, Reed GT.

Opt Lett. 2009 Mar 1;34(5):659-61.

PMID:
19252584
13.

Metal-assisted chemical etching of silicon: a review.

Huang Z, Geyer N, Werner P, de Boor J, Gösele U.

Adv Mater. 2011 Jan 11;23(2):285-308. doi: 10.1002/adma.201001784. Review.

PMID:
20859941
14.

Surface roughness and gloss of dental materials as a function of force and polishing time in vitro.

Heintze SD, Forjanic M, Rousson V.

Dent Mater. 2006 Feb;22(2):146-65. Epub 2005 Aug 9.

PMID:
16084582
15.

Metal-assisted electrochemical etching of silicon.

Huang ZP, Geyer N, Liu LF, Li MY, Zhong P.

Nanotechnology. 2010 Nov 19;21(46):465301. doi: 10.1088/0957-4484/21/46/465301. Epub 2010 Oct 25.

PMID:
20972316
16.
17.

Fabrication of compact turning mirrors in silicon-on-insulator materials.

Wang W, Tang Y, Li T, Wu Y, Yang J, Wang Y.

Appl Opt. 2005 Apr 20;44(12):2409-15.

PMID:
15861850
18.

Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining.

Deng Z, Yang Q, Chen F, Meng X, Bian H, Yong J, Shan C, Hou X.

Opt Lett. 2015 May 1;40(9):1928-31. doi: 10.1364/OL.40.001928.

PMID:
25927750
19.

Preparation of wafer-level glass cavities by a low-cost chemical foaming process (CFP).

Shang J, Chen B, Lin W, Wong CP, Zhang D, Xu C, Liu J, Huang QA.

Lab Chip. 2011 Apr 21;11(8):1532-40. doi: 10.1039/c0lc00708k. Epub 2011 Mar 8.

PMID:
21387022
20.

Influence of abrasive particle size on surface properties of flowable composites.

Takanashi E, Kishikawa R, Ikeda M, Inai N, Otsuki M, Foxton RM, Tagami J.

Dent Mater J. 2008 Nov;27(6):780-6.

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