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Items: 3

1.

Fabrication of fluorine-doped diamond-like carbon stamps for UV nanoimprint lithography.

Altun AO, Jeong JH, Rha JJ, Choi DG, Kim KD, Lee ES.

Nanotechnology. 2006 Sep 28;17(18):4659-63. doi: 10.1088/0957-4484/17/18/022. Epub 2006 Aug 30.

PMID:
21727593
2.

Plasma fluorination of carbon-based materials for imprint and molding lithographic applications.

Schvartzman M, Mathur A, Hone J, Jahnes C, Wind SJ.

Appl Phys Lett. 2008 Oct 13;93(15):153105. Epub 2008 Oct 14.

3.

Vapor-phase self-assembled monolayer for improved mold release in nanoimprint lithography.

Jung GY, Li Z, Wu W, Chen Y, Olynick DL, Wang SY, Tong WM, Williams RS.

Langmuir. 2005 Feb 15;21(4):1158-61.

PMID:
15697253

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