Format
Sort by

Send to

Choose Destination

Search results

Items: 4

1.

Two Degree-of-Freedom Fiber-Coupled Heterodyne Grating Interferometer with Milli-Radian Operating Range of Rotation.

Yang F, Zhang M, Zhu Y, Ye W, Wang L, Xia Y.

Sensors (Basel). 2019 Jul 22;19(14). pii: E3219. doi: 10.3390/s19143219.

2.

Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System.

Ye W, Zhang M, Zhu Y, Wang L, Hu J, Li X, Hu C.

Sensors (Basel). 2019 May 27;19(10). pii: E2409. doi: 10.3390/s19102409.

3.

Three-degrees-of-freedom laser interferometer based on differential wavefront sensing with wide angular measurement range.

Yang F, Zhang M, Ye W, Wang L.

Appl Opt. 2019 Jan 20;58(3):723-728. doi: 10.1364/AO.58.000723.

PMID:
30694260
4.

Translational displacement computational algorithm of the grating interferometer without geometric error for the wafer stage in a photolithography scanner.

Ye W, Zhang M, Zhu Y, Wang L, Hu J, Li X, Hu C.

Opt Express. 2018 Dec 24;26(26):34734-34752. doi: 10.1364/OE.26.034734.

PMID:
30650893

Supplemental Content

Loading ...
Support Center