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Micromachines (Basel). 2019 Apr 18;10(4). pii: E259. doi: 10.3390/mi10040259.

3-D Design and Simulation of a Piezoelectric Micropump.

Author information

1
MEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy. seyedamir.farshchi@polimi.it.
2
MEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy. alberto.corigliano@polimi.it.
3
MEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy. raffaele.ardito@polimi.it.

Abstract

The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid-structure interaction. The maximum predicted outflow is 1.62 μL min - 1 , obtained at 10 Hz working frequency. The computational model enables the optimization of geometrical features, with the goal to improve the pumping efficiency: The outflow is increased until 2.5 μL min - 1 .

KEYWORDS:

finite element method (FEM); fluid–structure interaction (FSI); micro electromechanical systems (MEMS); multiphysics simulation; piezoelectric material

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