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Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO₂.

Wu K, Tichem M.

Micromachines (Basel). 2018 Sep 27;9(10). pii: E496. doi: 10.3390/mi9100496.


Electrothermal Actuators for SiO₂ Photonic MEMS.

Peters TJ, Tichem M.

Micromachines (Basel). 2016 Nov 7;7(11). pii: E200. doi: 10.3390/mi7110200.

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