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Micromachines (Basel). 2020 Jan 21;11(2). pii: E112. doi: 10.3390/mi11020112.

Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering.

Yan L1,2, Yang D1,2, Gong Q1,2,3, Li Y1,2,3.

Author information

1
State Key Laboratory for Mesoscopic Physics, Collaborative Innovation Center of Quantum Matter, Department of Physics, Peking University, Beijing 100871, China.
2
Frontiers Science Center for Nano-optoelectronics, Peking University, Beijing 100871, China.
3
Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China.

Abstract

Femtosecond laser direct writing through two-photon polymerization has been widely used in precision fabrication of three-dimensional microstructures but is usually time consuming. In this article, we report the rapid fabrication of continuous surface Fresnel lens array through femtosecond laser three-dimensional focal field engineering. Each Fresnel lens is formed by continuous two-photon polymerization of the two-dimensional slices of the whole structure with one-dimensional scan of the corresponding two-dimensional engineered intensity distribution. Moreover, we anneal the lens array to improve its focusing and imaging performance.

KEYWORDS:

Fresnel lens; femtosecond laser direct writing; three-dimensional focal field engineering; two-photon polymerization

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