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J Nanosci Nanotechnol. 2010 Nov;10(11):7533-6.

Transduction dependent optimization of electromechanical parameters for electrostatically actuated MEMS/NEMS resonators.

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1
Department of Engineering, University of Cambridge, Cambridge CB2 1PZ, UK.

Abstract

This paper demonstrates an accurate model to predict the overall effective mass in micro- and nanomechanical resonators with non-uniform deformation along the transduction area. The model is verified experimentally through parameter extraction on various types of resonators with an error less than 3% well within the bounds dictated by manufacturing tolerances. Based on the model, an optimization of transduction electrode designs is proposed for micro- and nanomechanical resonators vibrating in the fabrication plane.

PMID:
21137976

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