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Nanomaterials (Basel). 2019 Dec 26;10(1). pii: E60. doi: 10.3390/nano10010060.

First Proof-of-Principle of Inorganic Lead Halide Perovskites Deposition by Magnetron-Sputtering.

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DIEF-Industrial Engineering Department, University of Florence, Via S. Marta 3, 50139 Florence, Italy.
INSTM-Interuniversity National Consortium for Material Science and Technology, Via Giusti 9, 50121 Florence, Italy.
Department of Physics and Astronomy, University of Florence, via G. Sansone 1, 50019 Sesto Fiorentino (FI), Italy.
LENS-European Laboratory for Non-Linear Spectroscopy, via Nello Carrara 1, I-50019 Sesto Fiorentino (FI), Italy.
INFN-National Institute for Nuclear Physics, via G. Sansone 1, 50019 Sesto Fiorentino (FI), Italy.
Chemistry Department "U. Schiff", University of Florence, via della Lastruccia 3, 50019 Sesto Fiorentino (FI), Italy.


The present work reports the application of RF-magnetron sputtering technique to realize CsPbBr 3 70 nm thick films on glass substrate by means of a one-step procedure. The obtained films show highly uniform surface morphology and homogeneous thickness as evidenced by AFM and SEM investigations. XRD measurements demonstrate the presence of two phases: a dominant orthorhombic CsPbBr 3 and a subordinate CsPb 2 Br 5 . Finally, XPS data reveals surface bromine depletion respect to the stoichiometrical CsPbBr 3 composition, nevertheless photoluminescence spectroscopy results confirm the formation of a highly luminescent film. These preliminary results demonstrate that our approach could be of great relevance for easy fabrication of large area perovskite thin films. Future developments, based on this approach, may include the realization of multijunction solar cells and multicolor light emitting devices.


caesium lead halides; magnetron-sputtering; perovskite; thin-film

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