Format

Send to

Choose Destination
Micromachines (Basel). 2019 Apr 30;10(5). pii: E295. doi: 10.3390/mi10050295.

2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope.

Yao CY1,2, Li B3,4, Qiu Z5,6,7.

Author information

1
Department of Biomedical Engineering, Michigan State University, East Lansing, MI 48823, USA. yaochen5@msu.edu.
2
Institute for Quantitative Health Science and Engineering, Michigan State University, East Lansing, MI 48823, USA. yaochen5@msu.edu.
3
Institute for Quantitative Health Science and Engineering, Michigan State University, East Lansing, MI 48823, USA. libo2@msu.edu.
4
Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48823, USA. libo2@msu.edu.
5
Department of Biomedical Engineering, Michigan State University, East Lansing, MI 48823, USA. qiuzhen@egr.msu.edu.
6
Institute for Quantitative Health Science and Engineering, Michigan State University, East Lansing, MI 48823, USA. qiuzhen@egr.msu.edu.
7
Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48823, USA. qiuzhen@egr.msu.edu.

Abstract

The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) fluorescence intraoperative confocal microscopic imaging system with a compact form factor. A silicon-on-insulator (SOI)-wafer based dicing-free microfabrication process has been developed for mass-production with high yield. Based on an in-plane comb-drive configuration, the resonant MEMS scanner performs 2D Lissajous pattern scanning with a large mechanical scanning angle (MSA, ±4°) on each axis at low driving voltage (36 V). A large field-of-view (FOV) has been achieved by using a post-objective scanning architecture of the confocal microscope. We have integrated the new MEMS scanner into a custom-made NIR fluorescence intraoperative confocal microscope with an outer diameter of 5.5 mm at its distal-end. Axial scanning has been achieved by using a piezoelectric actuator-based driving mechanism. We have successfully demonstrated ex vivo 2D imaging on human tissue specimens with up to five frames/s. The 2D resonant MEMS scanner can potentially be utilized for many applications, including multiphoton microendoscopy and wide-field endoscopy.

KEYWORDS:

2D Lissajous; NIR fluorescence; electrostatic; fluorescence confocal; intraoperative microscope; parametric resonance; resonant MEMS scanner

PMID:
31052229
DOI:
10.3390/mi10050295
Free full text

Supplemental Content

Full text links

Icon for Multidisciplinary Digital Publishing Institute (MDPI) Icon for PubMed Central
Loading ...
Support Center