Format

Send to

Choose Destination
Sensors (Basel). 2017 May 10;17(5). pii: E1080. doi: 10.3390/s17051080.

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics.

Author information

1
Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy. claudio.abels@hsrw.eu.
2
Università del Salento, Dipartimento di Ingegneria dell'Innovazione, Lecce 73100, Italy. claudio.abels@hsrw.eu.
3
Rhine-Waal University of Applied Sciences, Faculty of Technology and Bionics, Kleve 47533, Germany. claudio.abels@hsrw.eu.
4
Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy. vincenzo.mastronardi@iit.it.
5
Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy. francesco.guido@iit.it.
6
Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy. tommaso.dattoma@iit.it.
7
Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy. antonio.qualtieri@iit.it.
8
Rhine-Waal University of Applied Sciences, Faculty of Technology and Bionics, Kleve 47533, Germany. william.megill@hsrw.eu.
9
Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy. massimo.devittorio@iit.it.
10
Università del Salento, Dipartimento di Ingegneria dell'Innovazione, Lecce 73100, Italy. massimo.devittorio@iit.it.
11
Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy. francesco.rizzi@iit.it.

Abstract

The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, Si x N y /Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.

KEYWORDS:

MEMS; aluminum nitride; flow sensing; piezoelectric; piezoresistive; silicon nitride; stress-driven; tactile sensing

Supplemental Content

Full text links

Icon for Multidisciplinary Digital Publishing Institute (MDPI) Icon for PubMed Central
Loading ...
Support Center