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Items: 1 to 20 of 31

1.

Comprehensive Die Shear Test of Silicon Packages Bonded by Thermocompression of Al Layers with Thin Sn Capping or Insertions.

Satoh S, Fukushi H, Esashi M, Tanaka S.

Micromachines (Basel). 2018 Apr 11;9(4). pii: E174. doi: 10.3390/mi9040174.

2.

Design and Fabrication Technology of Low Profile Tactile Sensor with Digital Interface for Whole Body Robot Skin.

Makihata M, Muroyama M, Tanaka S, Nakayama T, Nonomura Y, Esashi M.

Sensors (Basel). 2018 Jul 21;18(7). pii: E2374. doi: 10.3390/s18072374.

3.

Stacked Integration of MEMS on LSI.

Esashi M, Tanaka S.

Micromachines (Basel). 2016 Aug 5;7(8). pii: E137. doi: 10.3390/mi7080137.

4.

Wave Propagation Direction and c-Axis Tilt Angle Influence on the Performance of ScAlN/Sapphire-Based SAW Devices.

Kochhar A, Yamamoto Y, Teshigahara A, Hashimoto KY, Tanaka S, Esashi M.

IEEE Trans Ultrason Ferroelectr Freq Control. 2016 Jul;63(7):953-60. doi: 10.1109/TUFFC.2016.2539226. Epub 2016 Mar 11.

PMID:
26978772
5.

On-Chip Micro-Pseudocapacitors for Ultrahigh Energy and Power Delivery.

Han J, Lin YC, Chen L, Tsai YC, Ito Y, Guo X, Hirata A, Fujita T, Esashi M, Gessner T, Chen M.

Adv Sci (Weinh). 2015 Apr 2;2(5):1500067. eCollection 2015 May.

6.

Advanced LSI-based amperometric sensor array with light-shielding structure for effective removal of photocurrent and mode selectable function for individual operation of 400 electrodes.

Inoue KY, Matsudaira M, Nakano M, Ino K, Sakamoto C, Kanno Y, Kubo R, Kunikata R, Kira A, Suda A, Tsurumi R, Shioya T, Yoshida S, Muroyama M, Ishikawa T, Shiku H, Satoh S, Esashi M, Matsue T.

Lab Chip. 2015 Feb 7;15(3):848-56. doi: 10.1039/c4lc01099j.

PMID:
25483361
7.

Highly c-axis-oriented monocrystalline Pb(Zr, Ti)O₃ thin films on si wafer prepared by fast cooling immediately after sputter deposition.

Yoshida S, Hanzawa H, Wasa K, Esashi M, Tanaka S.

IEEE Trans Ultrason Ferroelectr Freq Control. 2014 Sep;61(9):1552-8. doi: 10.1109/TUFFC.2014.3069.

PMID:
25167155
8.

Focusing and waveguiding of Lamb waves in micro-fabricated piezoelectric phononic plates.

Chiou MJ, Lin YC, Ono T, Esashi M, Yeh SL, Wu TT.

Ultrasonics. 2014 Sep;54(7):1984-90. doi: 10.1016/j.ultras.2014.05.007. Epub 2014 May 24.

PMID:
24909597
9.

Metallic glass thin films for potential biomedical applications.

Kaushik N, Sharma P, Ahadian S, Khademhosseini A, Takahashi M, Makino A, Tanaka S, Esashi M.

J Biomed Mater Res B Appl Biomater. 2014 Oct;102(7):1544-52. doi: 10.1002/jbm.b.33135. Epub 2014 Mar 8.

PMID:
24610895
10.

An optically switchable emitter array with carbon nanotubes grown on a Si tip for multielectron beam lithography.

Tanaka Y, Miyashita H, Esashi M, Ono T.

Nanotechnology. 2013 Jan 11;24(1):015203. doi: 10.1088/0957-4484/24/1/015203. Epub 2012 Dec 10.

PMID:
23221318
11.

Lithium-niobate-based surface acoustic wave oscillator directly integrated with CMOS sustaining amplifier.

Tanaka S, Park K, Esashi M.

IEEE Trans Ultrason Ferroelectr Freq Control. 2012 Aug;59(8):1800-5. doi: 10.1109/TUFFC.2012.2384.

PMID:
22899126
12.

LSI-based amperometric sensor for bio-imaging and multi-point biosensing.

Inoue KY, Matsudaira M, Kubo R, Nakano M, Yoshida S, Matsuzaki S, Suda A, Kunikata R, Kimura T, Tsurumi R, Shioya T, Ino K, Shiku H, Satoh S, Esashi M, Matsue T.

Lab Chip. 2012 Sep 21;12(18):3481-90. doi: 10.1039/c2lc40323d. Epub 2012 Jul 30.

PMID:
22847217
13.

Micromirror with large-tilting angle using Fe-based metallic glass.

Lee JW, Lin YC, Kaushik N, Sharma P, Makino A, Inoue A, Esashi M, Gessner T.

Opt Lett. 2011 Sep 1;36(17):3464-6. doi: 10.1364/OL.36.003464.

PMID:
21886245
14.

Local electrical modification of a conductivity-switching polyimide film formed by molecular layer deposition.

Yoshida S, Ono T, Esashi M.

Nanotechnology. 2011 Aug 19;22(33):335302. doi: 10.1088/0957-4484/22/33/335302. Epub 2011 Jul 25.

PMID:
21788684
15.

Imprinted laminate wafer-level packaging for SAW ID-tags and SAW delay line sensors.

Kuypers JH, Tanaka S, Esashi M.

IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Feb;58(2):406-13. doi: 10.1109/TUFFC.2011.1818.

PMID:
21342826
16.

Etch rate dependence on crystal orientation of lithium niobate.

Randles AB, Esashi M, Tanaka S.

IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Nov;57(11):2372-80. doi: 10.1109/TUFFC.2010.1705.

PMID:
21041126
17.

Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz.

Takahashi A, Esashi M, Ono T.

Nanotechnology. 2010 Oct 8;21(40):405502. doi: 10.1088/0957-4484/21/40/405502. Epub 2010 Sep 10.

PMID:
20829565
18.

Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy.

Shao CY, Kawai Y, Esashi M, Ono T.

Rev Sci Instrum. 2010 Aug;81(8):083702. doi: 10.1063/1.3469796.

PMID:
20815608
19.

The fabrication of metallic tips with a silicon cantilever for probe-based ferroelectric data storage and their durability experiments.

Takahashi H, Mimura Y, Mori S, Ishimori M, Onoe A, Ono T, Esashi M.

Nanotechnology. 2009 Sep 9;20(36):365201. doi: 10.1088/0957-4484/20/36/365201. Epub 2009 Aug 18.

PMID:
19687555
20.

Thermal imaging with tapping mode using a bimetal oscillator formed at the end of a cantilever.

Kim SJ, Ono T, Esashi M.

Rev Sci Instrum. 2009 Mar;80(3):033703. doi: 10.1063/1.3095680.

PMID:
19334923

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