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J Nanosci Nanotechnol. 2019 Jan 1;19(1):546-553. doi: 10.1166/jnn.2019.16474.

Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range.

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Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia.
Institute for Nanometre Optics and Technology, HZB-BESSY-II, Berlin, 12489, Germany.


This paper presents the first results of systematic studies of beryllium as a material for multilayer mirrors (MLM) and transmission filters (TF) for the EUV spectral range. The objective for the study is the need for the increase in reflectivity and spectral resolution of MLMs for studying the Sun's corona. We investigated Mo/Be (working wavelength is 13.2 nm), Be/Al and Be/Si/Al (17.1 and 30.4 nm) multilayers, as well as free-standing Be films. It was shown that the Be-containing MLMs have significant advantage in reflectivity while their spectral pass-band is similar to beryllium-free MLMs. Observation of the MLMs in the course of 20 months has not revealed any significant decrease in the reflection coefficient. Effect of the silicon interlayers on reflectance of Be/Al MLM is explained. Investigation of a free-standing beryllium filter of the 160 nm thickness showed that its mechanical strength is approximately at the same level as that of the aluminum filter with the same thickness. There is also high stability of the transmittance.


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