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Rev Sci Instrum. 2019 Aug;90(8):083101. doi: 10.1063/1.5109913.

Photon-counting laser interferometer for absolute distance measurement on rough surface.

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State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.


We designed a dual-wavelength photon-counting laser interferometer for absolute distance measurement of noncooperative targets. The weak optical interference on the rough surface was measured by a single-photon detector. The range of nonambiguity of the dual-wavelength interferometer was less than 1.2 μm, as the maximum errors of Lg and Lr were 7.8 nm and 9.1 nm caused by the photon-counting measurement and the frequency shift of the two unlocked lasers. We integrated laser triangulation into the interferometer as a coarse measurement, thus increasing the range of nonambiguity to 6.5 mm. As a result, a measurement standard deviation of ∼18 nm was achieved within a range of 1.1 mm in the experiment.


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