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Micromachines (Basel). 2019 Apr 27;10(5). pii: E286. doi: 10.3390/mi10050286.

Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry.

Author information

1
School of Life and Environmental Sciences, GuiLin University of Electronic Technology, Guilin 541004, China. lihua@guet.edu.cn.
2
School of Life and Environmental Sciences, GuiLin University of Electronic Technology, Guilin 541004, China. yun1472372895@126.com.
3
School of Life and Environmental Sciences, GuiLin University of Electronic Technology, Guilin 541004, China. 13997815375@163.com.
4
School of Life and Environmental Sciences, GuiLin University of Electronic Technology, Guilin 541004, China. 18877382996@163.com.
5
School of Life and Environmental Sciences, GuiLin University of Electronic Technology, Guilin 541004, China. zengrsh@guet.edu.cn.
6
School of Life and Environmental Sciences, GuiLin University of Electronic Technology, Guilin 541004, China. svmsung2996@sina.com.
7
School of Life and Environmental Sciences, GuiLin University of Electronic Technology, Guilin 541004, China. chenzhcheng@guet.edu.cn.

Abstract

A needle-to-cylinder electrode, adopted as an ion source for high-field asymmetric ion mobility spectrometry (FAIMS), is designed and fabricated by lithographie, galvanoformung and abformung (LIGA) technology. The needle, with a tip diameter of 20 μm and thickness of 20 μm, and a cylinder, with a diameter of 400 μm, were connected to the negative high voltage and ground, respectively. A negative corona and glow discharge were realized. For acetone with a density of 99.7 ppm, ethanol with a density of 300 ppm, and acetic ether with a density of 99.3 ppm, the sample gas was ionized by the needle-to-cylinder chip and the ions were detected by an LTQ XL™ (Thermo Scientific Corp.) mass spectrometer. The mass spectra show that the ions are mainly the protonated monomer, the proton bound dimer, and an ion-H2O molecule cluster. In tandem with a FAIMS system, the FAIMS spectra show that the resolving power increases with an increase in the RF voltage. The obtained experimental results showed that the micro needle-to-cylinder chip may serve as a miniature, low cost and non-radioactive ion source for FAIMS.

KEYWORDS:

high-field asymmetric ion mobility spectrometry (FAIMS); ion source; lithographie, galvanoformung and abformung (LIGA); needle-to-cylinder

PMID:
31035626
DOI:
10.3390/mi10050286
Free PMC Article

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