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Sensors (Basel). 2019 Mar 15;19(6). pii: E1300. doi: 10.3390/s19061300.

Highly Sensitive Tactile Shear Sensor Using Spatially Digitized Contact Electrodes.

Author information

1
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. silver77@hanyang.ac.kr.
2
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. hsh8701@gmail.com.
3
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. ysyoon88@hanyang.ac.kr.
4
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. masiks@hanyang.ac.kr.
5
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. jusin19@hanyang.ac.kr.
6
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. yso526@hanyang.ac.kr.
7
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. rgw00@hanyang.ac.kr.
8
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. heewon0820@hanyang.ac.kr.
9
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. akangel0307@hanyang.ac.kr.
10
Institute of Nano Science and Technology, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. ojsul@hanyang.ac.kr.
11
Department of Electronic Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. sbl22@hanyang.ac.kr.
12
Institute of Nano Science and Technology, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea. sbl22@hanyang.ac.kr.

Abstract

In this article, we report on a highly sensitive tactile shear sensor that was able to detect minute levels of shear and surface slip. The sensor consists of a suspended elastomer diaphragm with a top ridge structure, a graphene layer underneath, and a bottom substrate with multiple spatially digitized contact electrodes. When shear is applied to the top ridge structure, it creates torque and deflects the elastomer downwards. Then, the graphene electrode makes contact with the bottom spatially digitized electrodes completing a circuit producing output currents depending on the number of electrodes making contact. The tactile shear sensor was able to detect shear forces as small as 6 μN, detect shear direction, and also distinguish surface friction and roughness differences of shearing objects. We also succeeded in detecting the contact slip motion of a single thread demonstrating possible applications in future robotic fingers and remote surgical tools.

KEYWORDS:

friction detection; high sensitivity; shear sensor; surface roughness detection

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