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Sensors (Basel). 2019 Mar 1;19(5). pii: E1046. doi: 10.3390/s19051046.

Formation of Interstitial Hot-Spots Using the Reduced Gap-Size between Plasmonic Microbeads Pattern for Surface-Enhanced Raman Scattering Analysis.

Author information

1
Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 34103, Korea. rubin16@kimm.re.kr.
2
Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 34103, Korea. luckyheeee@naver.com.
3
Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 34103, Korea. sgkwon@kimm.re.kr.
4
Department of Control and Instrumentation Engineering, Korea University, Sejong 30019, Korea. chang1121@korea.ac.kr.
5
Department of Control and Instrumentation Engineering, Korea University, Sejong 30019, Korea. shindew@korea.ac.kr.
6
Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 34103, Korea. hjlim@kimm.re.kr.
7
Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 34103, Korea. jjlee@kimm.re.kr.

Abstract

To achieve an effective surface-enhanced Raman scattering (SERS) sensor with periodically distributed "hot spots" on wafer-scale substrates, we propose a hybrid approach combining physical nano-imprint lithography and a chemical deposition method to form a silver microbead array. Nano-imprint lithography (NIL) can lead to mass-production and high throughput, but is not appropriate for generating strong "hot-spots." However, when we apply electrochemical deposition to an NIL substrate and the reaction time was increased to 45 s, periodical "hot-spots" between the microbeads were generated on the substrates. It contributed to increasing the enhancement factor (EF) and lowering the detection limit of the substrates to 4.40 × 10⁶ and 1.0 × 10-11 M, respectively. In addition, this synthetic method exhibited good substrate-to-substrate reproducibility (RSD < 9.4%). Our research suggests a new opportunity for expanding the SERS application.

KEYWORDS:

SERS; electrodeposition; gold; nano patterning; nano-gap; nano-imprint lithography; silver

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