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Sensors (Basel). 2019 Feb 6;19(3). pii: E659. doi: 10.3390/s19030659.

Humidity Sensors with Shielding Electrode Under Interdigitated Electrode.

Author information

1
ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China. 16210720074@fudan.edu.cn.
2
ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China. 18212020034@fudan.edu.cn.
3
ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China. wsheng13@fudan.edu.cn.
4
ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China. xbwang16@fudan.edu.cn.
5
ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China. 15110720079@fudan.edu.cn.
6
ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China. 17112020015@fudan.edu.cn.
7
ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China. jia.zhou@fudan.edu.cn.

Abstract

Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% ± 0.0002% RH. Its response/recovery time is 20 s/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH.

KEYWORDS:

IDE; PI; SIDE; capacitive; humidity sensor

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