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Nano Lett. 2018 Sep 12;18(9):5461-5466. doi: 10.1021/acs.nanolett.8b01855. Epub 2018 Aug 24.

Ultra Gas-Proof Polymer Hybrid Thin Layer.

Author information

1
Department of Chemistry , Hanyang University , Seoul 04763 , Republic of Korea.
2
Display Research Center , Samsung Display , Yongin-si , Gyeonggi-do 17113 , Republic of Korea.

Abstract

Hermetic sealing is an important technology for isolating and protecting air-sensitive materials and is key in the development of foldable and stretchable electronic devices. Here we report an ultra gas-proof polymer hybrid thin layer prepared by filling the free volume of the polymer with Al2O3 using gas-phase atomic layer infiltration. The high-density polymer-inorganic hybrid shows extremely low gas transmission rate, below the detection limit of the Ca corrosion test (water vapor transmission rate <10-7 g m-2 day-1). Furthermore, because of the remarkable nanometer-scale thinness of the complete polymer-inorganic hybrid, it is highly flexible, which makes it useful for hermetic sealing of stretchable and foldable devices.

KEYWORDS:

atomic layer infiltration; encapsulation film; flexible OLED; hermetic sealing; organic−inorganic hybrid thin layer

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