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Int J Environ Res Public Health. 2018 Jun 3;15(6). pii: E1162. doi: 10.3390/ijerph15061162.

Comprehensive Evaluation of Hazardous Chemical Exposure Control System at a Semiconductor Manufacturing Company in South Korea.

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Department of Occupational Health, Daegu Catholic University, Gyeongbuk 38430, Korea.
Department of Environmental Health Science and Institute of Health and Environment, Graduate School of Public Health, Seoul National University, Seoul 08826, Korea.
Department of Public Health, Keimyung University, Daegu 42601, Korea.
Wonjin Institute for Occupational and Environmental Health, Seoul 02221, Korea.
Department of Biohealth Science, Changwon National University, Changwon 51140, Korea.
Department of Occupational and Environmental Health, Yongin University, Yongin 17092, Korea.
Boram E&T Co.Ltd., Gwangju 61007, Korea.
Occupational Lung Disease Institute, Korea Workers' Compensation and Welfare Service, Incheon 21417, Korea.
Department of Environmental Health, Korea National Open University, Seoul 03087, Korea.


The goal of this study was to evaluate the hazardous chemical exposure control system in a semiconductor manufacturing company and recommend an appropriate exposure surveillance system for hazardous agents. We reviewed compliance-based chemical exposure data compiled between 2012 and 2014 by the study company. The chemical management system, characteristics of chemical use and hazardous gas monitoring system were also investigated. We evaluated the airborne isopropyl alcohol (IPA) and acetone generally used as cleaning solvents, volatile organic compounds and metals levels using internationally recommended sampling and analytical methods. Based on the results of past working environment measurement data and of our investigation, the overall current exposure to chemicals by semiconductor workers during routine production work appears to be controlled below occupational exposure limits. About 40% of chemical products used were found to contain at least one unidentifiable trade-secret substance. There are several situations and maintenance tasks that need special attention to reduce exposure to carcinogens as much as possible. In addition, a job-exposure matrix as a tool of surveillance system that can examine the exposure and health status of semiconductor workers according to type of operation and type of job or task is recommended.


exposure control system; hazardous chemical; job-exposure matrix; semiconductor

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