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Sensors (Basel). 2018 Mar 31;18(4). pii: E1047. doi: 10.3390/s18041047.

A Monolithic Electrochemical Micro Seismic Sensor Capable of Monitoring Three-Dimensional Vibrations.

Chen L1,2, Sun Z3,4, Li G5,6, Chen D7,8, Wang J9,10, Chen J11,12.

Author information

1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190 Beijing, China. chenlianhong15@mails.ucas.ac.cn.
2
School of Electronic, Electrical and Communication Engineering, Chinese Academy of Sciences, 100190 Beijing, China. chenlianhong15@mails.ucas.ac.cn.
3
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190 Beijing, China. sunzhenyuan@mail.tsinghua.edu.cn.
4
School of Electronic, Electrical and Communication Engineering, Chinese Academy of Sciences, 100190 Beijing, China. sunzhenyuan@mail.tsinghua.edu.cn.
5
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190 Beijing, China. wkliguanglei@163.com.
6
School of Electronic, Electrical and Communication Engineering, Chinese Academy of Sciences, 100190 Beijing, China. wkliguanglei@163.com.
7
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190 Beijing, China. dychen@mail.ie.ac.cn.
8
School of Electronic, Electrical and Communication Engineering, Chinese Academy of Sciences, 100190 Beijing, China. dychen@mail.ie.ac.cn.
9
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190 Beijing, China. jbwang@mail.ie.ac.cn.
10
School of Electronic, Electrical and Communication Engineering, Chinese Academy of Sciences, 100190 Beijing, China. jbwang@mail.ie.ac.cn.
11
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190 Beijing, China. chenjian@mail.ie.ac.cn.
12
School of Electronic, Electrical and Communication Engineering, Chinese Academy of Sciences, 100190 Beijing, China. chenjian@mail.ie.ac.cn.

Abstract

A monolithic electrochemical micro seismic sensor capable of monitoring three-axial vibrations was proposed in this paper. The proposed micro sensor mainly consisted of four sensing units interconnected within flow channels and by interpreting the voltage outputs of the sensing units, vibrations with arbitrary directions can be quantified. The proposed seismic sensors are fabricated based on MEMS technologies and characterized, which produced sensitivities along x, y, and z axes as 2473.2 ± 184.5 V/(m/s), 2261.7 ± 119.6 V/(m/s), and 3480.7 ± 417.2 V/(m/s) at 30 Hz. In addition, the vibrations in x-y, x-z, and y-z planes were applied to the developed seismic sensors, leading to comparable monitoring results after decoupling calculations with the input velocities. Furthermore, the results have shown its feasibilities for seismic data recording.

KEYWORDS:

decoupling mechanism; monolithic electrochemical seismic sensor; three-dimensional vibrations monitoring

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