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Adv Funct Mater. 2017 Apr 11;27(14). pii: 1605914. doi: 10.1002/adfm.201605914. Epub 2017 Mar 3.

Three-Dimensional Multiscale, Multistable, and Geometrically Diverse Microstructures with Tunable Vibrational Dynamics Assembled by Compressive Buckling.

Author information

1
Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (USA).
2
Departments of Civil and Environmental Engineering, and Mechanical Engineering, Northwestern University, Evanston, Illinois 60208 (USA).
3
Advanced Composites Centre for Innovation and Science, University of Bristol, Bristol, BS8 1TR (UK).
4
Department of Industrial and Enterprise Systems Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (USA).
5
Department of Chemistry, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (USA).
6
Department of Chemical and Biomolecular Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (USA).
7
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871 (P.R. China).
8
Man-machine-Environment Engineering Institute, Department of Aeronautics & Astronautics Engineering, School of Aerospace Engineering, Tsinghua University, Beijing 100084 (P.R. China).
9
Departments of Civil and Environmental Engineering, Mechanical Engineering, and Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208 (USA).
10
Center for Mechanics and Materials, AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084 (P.R. China).
11
Department of Materials Science and Engineering, Biomedical Engineering, Neurological Surgery, Chemistry, Mechanical Engineering, Electrical Engineering and Computer Science, Simpson Querrey Institute and Feinberg Medical School, Center for Bio-Integrated Electronics, Northwestern University, Evanston, Illinois 60208 (USA).

Abstract

Microelectromechanical systems remain an area of significant interest in fundamental and applied research due to their wide ranging applications. Most device designs, however, are largely two-dimensional and constrained to only a few simple geometries. Achieving tunable resonant frequencies or broad operational bandwidths requires complex components and/or fabrication processes. The work presented here reports unusual classes of three-dimensional (3D) micromechanical systems in the form of vibratory platforms assembled by controlled compressive buckling. Such 3D structures can be fabricated across a broad range of length scales and from various materials, including soft polymers, monocrystalline silicon, and their composites, resulting in a wide scope of achievable resonant frequencies and mechanical behaviors. Platforms designed with multistable mechanical responses and vibrationally de-coupled constituent elements offer improved bandwidth and frequency tunability. Furthermore, the resonant frequencies can be controlled through deformations of an underlying elastomeric substrate. Systematic experimental and computational studies include structures with diverse geometries, ranging from tables, cages, rings, ring-crosses, ring-disks, two-floor ribbons, flowers, umbrellas, triple-cantilever platforms, and asymmetric circular helices, to multilayer constructions. These ideas form the foundations for engineering designs that complement those supported by conventional, microelectromechanical systems, with capabilities that could be useful in systems for biosensing, energy harvesting and others.

KEYWORDS:

3D microstructures; Compressive Buckling; Microelectromechanical systems; vibrational modes

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