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Adv Mater. 2018 Feb;30(8). doi: 10.1002/adma.201704839. Epub 2018 Jan 10.

Switching Vertical to Horizontal Graphene Growth Using Faraday Cage-Assisted PECVD Approach for High-Performance Transparent Heating Device.

Author information

1
Center for Nanochemistry (CNC), Academy for Advanced Interdisciplinary Studies, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China.
2
Key Laboratory for the Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing, 100871, China.
3
Electron Microscopy Laboratory, School of Physics, Center for Nanochemistry (CNC), Peking University, Beijing, 100871, China.
4
Institute of Functional Nano and Soft Materials (FUNSOM), Soochow University, Suzhou, Jiangsu, 215006, P. R. China.
5
Soochow Institute for Energy and Materials Innovations (SIEMIS), Key Laboratory of Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province, Soochow University, Suzhou, Jiangsu, 215006, P. R. China.
6
Soochow Institute For Energy and Materials Innovations (SIEMIS), School of Energy, College of Physics, Optoelectronic and Energy, Soochow University, Suzhou, Jiangsu, 215006, P. R. China.
7
Beijing Graphene Institute (BGI), Beijing, 100095, China.
8
Department of Materials Science and Engineering, College of Engineering, Peking University, Beijing, 100871, P. R. China.

Abstract

Plasma-enhanced chemical vapor deposition (PECVD) is an applicable route to achieve low-temperature growth of graphene, typically shaped like vertical nanowalls. However, for transparent electronic applications, the rich exposed edges and high specific surface area of vertical graphene (VG) nanowalls can enhance the carrier scattering and light absorption, resulting in high sheet resistance and low transmittance. Thus, the synthesis of laid-down graphene (LG) is imperative. Here, a Faraday cage is designed to switch graphene growth in PECVD from the vertical to the horizontal direction by weakening ion bombardment and shielding electric field. Consequently, laid-down graphene is synthesized on low-softening-point soda-lime glass (6 cm × 10 cm) at ≈580 °C. This is hardly realized through the conventional PECVD or the thermal chemical vapor deposition methods with the necessity of high growth temperature (1000 °C-1600 °C). Laid-down graphene glass has higher transparency, lower sheet resistance, and much improved macroscopic uniformity when compare to its vertical graphene counterpart and it performs better in transparent heating devices. This will inspire the next-generation applications in low-cost transparent electronics.

KEYWORDS:

Faraday cages; laid-down graphene; plasma-enhanced chemical vapor deposition; vertical graphene

PMID:
29318672
DOI:
10.1002/adma.201704839

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