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Adv Mater. 2017 Oct;29(40). doi: 10.1002/adma.201702902. Epub 2017 Aug 28.

High-Resolution Spin-on-Patterning of Perovskite Thin Films for a Multiplexed Image Sensor Array.

Lee W1,2, Lee J1,2, Yun H1,2, Kim J1,2, Park J1,2, Choi C1,2, Kim DC1,2, Seo H1,2, Lee H1,2, Yu JW3, Lee WB3, Kim DH1,2.

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Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, 08826, Republic of Korea.
School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University (SNU), Seoul, 08826, Republic of Korea.
School of Chemical and Biological Engineering, Seoul National University (SNU), Seoul, 08826, Republic of Korea.


Inorganic-organic hybrid perovskite thin films have attracted significant attention as an alternative to silicon in photon-absorbing devices mainly because of their superb optoelectronic properties. However, high-definition patterning of perovskite thin films, which is important for fabrication of the image sensor array, is hardly accomplished owing to their extreme instability in general photolithographic solvents. Here, a novel patterning process for perovskite thin films is described: the high-resolution spin-on-patterning (SoP) process. This fast and facile process is compatible with a variety of spin-coated perovskite materials and perovskite deposition techniques. The SoP process is successfully applied to develop a high-performance, ultrathin, and deformable perovskite-on-silicon multiplexed image sensor array, paving the road toward next-generation image sensor arrays.


dewetting; high-resolution patterning; perovskite patterning; perovskite photodiode


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