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Adv Mater. 2017 Oct;29(40). doi: 10.1002/adma.201702902. Epub 2017 Aug 28.

High-Resolution Spin-on-Patterning of Perovskite Thin Films for a Multiplexed Image Sensor Array.

Lee W1,2, Lee J1,2, Yun H1,2, Kim J1,2, Park J1,2, Choi C1,2, Kim DC1,2, Seo H1,2, Lee H1,2, Yu JW3, Lee WB3, Kim DH1,2.

Author information

1
Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, 08826, Republic of Korea.
2
School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University (SNU), Seoul, 08826, Republic of Korea.
3
School of Chemical and Biological Engineering, Seoul National University (SNU), Seoul, 08826, Republic of Korea.

Abstract

Inorganic-organic hybrid perovskite thin films have attracted significant attention as an alternative to silicon in photon-absorbing devices mainly because of their superb optoelectronic properties. However, high-definition patterning of perovskite thin films, which is important for fabrication of the image sensor array, is hardly accomplished owing to their extreme instability in general photolithographic solvents. Here, a novel patterning process for perovskite thin films is described: the high-resolution spin-on-patterning (SoP) process. This fast and facile process is compatible with a variety of spin-coated perovskite materials and perovskite deposition techniques. The SoP process is successfully applied to develop a high-performance, ultrathin, and deformable perovskite-on-silicon multiplexed image sensor array, paving the road toward next-generation image sensor arrays.

KEYWORDS:

dewetting; high-resolution patterning; perovskite patterning; perovskite photodiode

PMID:
28845897
DOI:
10.1002/adma.201702902

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