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Ultramicroscopy. 2017 Nov;182:112-117. doi: 10.1016/j.ultramic.2017.06.007. Epub 2017 Jun 12.

Toward an accurate quantification in atom probe tomography reconstruction by correlative electron tomography approach on nanoporous materials.

Author information

1
Univ. Grenoble Alpes, F-38000 Grenoble, France; CEA, LETI, Minatec Campus, F-38054 Grenoble, France. Electronic address: isabelle.mouton42@gmail.com.
2
Univ. Grenoble Alpes, F-38000 Grenoble, France; CEA, LETI, Minatec Campus, F-38054 Grenoble, France.
3
Dipartimento di Fisica, Università di Cagliari, Cittadella Universitaria, Monserrato (Ca), Italy.
4
Dipartimento di Ingegneria Meccanica, Chimica e dei Materiali, Università degli Studi di Cagliari, Cagliari (Ca), Italy.

Abstract

In this contribution, we propose a protocol for analysis and accurate reconstruction of nanoporous materials by atom probe tomography (APT). The existence of several holes in porous materials makes both the direct APT analysis and reconstruction almost inaccessible. In the past, a solution has been proposed by filling pores with electron beam-induced deposition. Here, we present an alternative solution using an electro-chemical method allowing to fill even small and dense pores, making APT analysis possible. Concerning the 3D reconstruction, the microstructural features observed by electron tomography are used to finely calibrate the APT reconstruction parameters.

KEYWORDS:

Atom probe tomography; Correlation; Electron tomography; Nanoporous

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