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Sensors (Basel). 2017 Jun 7;17(6). pii: E1310. doi: 10.3390/s17061310.

Development of High Sensitivity Humidity Sensor Based on Gray TiO₂/SrTiO₃ Composite.

Author information

1
The School of Physics Science and Technology, Xinjiang University, Urumqi 830046, China. minzhang0816@163.com.
2
Shanghai Key Lab of Chemical Assessment and Sustainability, School of Chemical Science and Engineering, Tongji University, 1239 Siping Road, Shanghai 200092, China. shun_hang@126.com.
3
Xinjiang Key Laboratory of Electronic Information Materials and Devices, Xinjiang Technical Institute of Physics & Chemistry, CAS, Urumqi 830011, China. renw@ms.xjb.ac.cn.
4
The School of Physics Science and Technology, Xinjiang University, Urumqi 830046, China. wurongxju@sina.com.

Abstract

A gray TiO₂/SrTiO₃ composite nanocrystalline sensor with narrow band-gap was successfully prepared through a facile wet chemical method. The precursor was calcined in N₂ flow under atmospheric pressure and thereafter, a humidity sensor based on the composite was fabricated. The sensor showed high resistive sensitivity and varied by more than four orders of magnitude with an increase in relative humidity (RH) from 11% to 95%. The response and recovery time were about 3.1 s and 76 s, respectively with maximum hysteresis at 1% RH. In comparison with pure SrTiO₃ and black TiO₂, the gray composite based device exhibits a higher sensitivity. These results demonstrate the potential of gray TiO₂/SrTiO₃ for humidity sensing applications.

KEYWORDS:

gray TiO2/SrTiO3 composite; humidity sensor; semiconductor

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