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Opt Express. 2017 Mar 6;25(5):5426-5430. doi: 10.1364/OE.25.005426.

Highly sensitive, wide dynamic range displacement sensor combining chromatic confocal system and phase-sensitive spectral optical coherence tomography.

Abstract

A displacement sensor with nanometer-sensitivity and a submillimeter dynamic range is proposed. It integrates a chromatic confocal system and phase-sensitive spectral optical coherence tomography (PhS-SOCT) into the fiber-based Michelson interferometer and codes interference and confocal signals with spectral multiplexing. A displacement is evaluated using depth-resolved phase information decoded from the interference signal, which is unwrapped based on the position information decoded from the confocal signal. A sensor system with a 0.102mm dynamic range was built to validate the method. The temperature induced sample surface displacement was measured with a root mean square error of 3.9nm.

PMID:
28380803
DOI:
10.1364/OE.25.005426

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