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Sensors (Basel). 2016 Sep 14;16(9). pii: E1479. doi: 10.3390/s16091479.

Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly.

Yang Z1,2, Wang Y3, Yang B4, Li G5, Chen T6,7, Nakajima M8, Sun L9,10, Fukuda T11,12.

Author information

1
Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China. yangzhan@suda.edu.cn.
2
Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. yangzhan@suda.edu.cn.
3
Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China. 20154229003@stu.suda.edu.cn.
4
School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China. yangbinfree@163.com.
5
Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China. 15151541352@163.com.
6
Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China. chent@suda.edu.cn.
7
Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. chent@suda.edu.cn.
8
Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan. nakajima@mein.nagoya-u.ac.jp.
9
Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China. lnsun@hit.edu.cn.
10
Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. lnsun@hit.edu.cn.
11
Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan. fukuda@mein.nagoya-u.ac.jp.
12
Intelligent Robotics Institute, School of Mechatronic Engineering, Beijing Institute of Technology, Beijing 100081, China. fukuda@mein.nagoya-u.ac.jp.

Abstract

Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and <1 micro-rad rotary resolution. Four vertically installed AFM cantilevers (the axis of the cantilever tip is vertical to the axis of electronic beam of SEM) served as the end-effectors to facilitate the real-time observation of the operations. A series of kinematic derivations of these four manipulators based on the Denavit-Hartenberg (D-H) notation were established. The common working space of the end-effectors is 2.78 mm by 4.39 mm by 6 mm. The manipulation strategy and vision feedback control for multi-manipulators operating inside the SEM chamber were been discussed. Finally, application of the designed nanorobotics manipulation system by successfully testing of the pickup-and-place manipulation of an individual CNT onto four probes was described. The experimental results have shown that carbon nanotubes can be successfully picked up with this nanorobotics manipulation system.

KEYWORDS:

carbon nanotube; mechatronics design and development; nanorobotics manipulation; visual feedback

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