In multiphase steels, control of the carbon contents in the respective phases is the most important factor in alloy design for achieving high strength and high ductility. However, it is unusually difficult to determine the carbon contents in multiphase structures with high accuracy by electron probe microanalysis (EPMA) due to the unavoidable effect of hydrocarbon contamination during measurements. We have investigated new methods for suppressing hydrocarbon contamination during field emission (FE) EPMA measurements as well as a conventional liquid nitrogen trap. Plasma cleaner inside the specimen chamber results in a improvement of carbon-content determination by point analysis, increasing precision tenfold from the previous 0.1 mass%C to 0.01 mass%C. Stage heating at about 100 °C dramatically suppresses contamination growth during continuous point measurement and mapping. By the combination of above two techniques, we successfully visualized the two-dimensional carbon distribution in a dual-phase steel. It was also noted that the carbon concentrations at the ferrite/martensite interfaces were not the same across all interfaces, and local variation was observed. The developed technique is expected to be a powerful tool for understanding the mechanisms of mechanical properties and microstructural evolution, thereby contributing to the design of new steel products with superior properties.