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Opt Lett. 2016 Jul 1;41(13):3090-3. doi: 10.1364/OL.41.003090.

Low-loss photonic device in Ge-Sb-S chalcogenide glass.

Abstract

Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge<sub>23</sub>Sb<sub>7</sub>S<sub>70</sub> chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2×10<sup>6</sup> were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.

PMID:
27367109
DOI:
10.1364/OL.41.003090

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