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Microsc Microanal. 2016 Jun;22(3):515-9. doi: 10.1017/S1431927616000593. Epub 2016 Mar 30.

Preparation and Loading Process of Single Crystalline Samples into a Gas Environmental Cell Holder for In Situ Atomic Resolution Scanning Transmission Electron Microscopic Observation.

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Faculty of Physics & Materials Science Center (WZMW),Philipps-Universit├Ąt Marburg,35032 Marburg,Germany.


A reproducible way to transfer a single crystalline sample into a gas environmental cell holder for in situ transmission electron microscopic (TEM) analysis is shown in this study. As in situ holders have only single-tilt capability, it is necessary to prepare the sample precisely along a specific zone axis. This can be achieved by a very accurate focused ion beam lift-out preparation. We show a step-by-step procedure to prepare the sample and transfer it into the gas environmental cell. The sample material is a GaP/Ga(NAsP)/GaP multi-quantum well structure on Si. Scanning TEM observations prove that it is possible to achieve atomic resolution at very high temperatures in a nitrogen environment of 100,000 Pa.


FIB preparation; III/V semiconductor; STEM; environmental cell; in situ


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