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Opt Express. 2015 Sep 7;23(18):23072-8. doi: 10.1364/OE.23.023072.

High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation.

Abstract

Lithium niobate (LN) microdisk resonators on a LN-silica-LN chip were fabricated using only conventional semiconductor fabrication processes. The quality factor of the LN resonator with a 39.6-μm radius and a 0.5-μm thickness is up to 1.19 × 10(6), which doubles the record of the quality factor 4.84 × 10(5) of LN resonators produced by microfabrication methods allowing batch production. Electro-optic modulation with an effective resonance-frequency tuning rate of 3.0 GHz/V was demonstrated in the fabricated LN microdisk resonator.

PMID:
26368411
DOI:
10.1364/OE.23.023072

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