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Adv Mater. 2015 Sep 16;27(35):5223-9. doi: 10.1002/adma.201501678. Epub 2015 Aug 10.

Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition.

Author information

1
SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
2
School of Mechanical Engineering, Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
3
School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), 50 UNIST-gil, Eonyang-eup, Ulsan, 689-798, South Korea.
4
School of Advanced Materials Science & Engineering, Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
5
Semiconductor R&D Center, Samsung Electronics, 1 Samsungjeonja-ro, Hwaseong, Gyeonggi-do, 445-701, South Korea.

Abstract

By plasma-enhanced chemical vapor deposition, a molybdenum disulfide (MoS2 ) thin film is synthesized directly on a wafer-scale plastic substrate at below 300 °C. The carrier mobility of the films is 3.74 cm(2) V(-1) s(-1) . Also, humidity is successfully detected with MoS2 -based sensors fabricated on the flexible substrate, which reveals its potential for flexible sensing devices.

KEYWORDS:

flexible sensor; low temperature; molybdenum disulfide (MoS2); plasma-enhanced chemical vapor deposition (PECVD); plastic substrate

PMID:
26257314
DOI:
10.1002/adma.201501678

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