Photoinitiated thiol-yne chemistry is utilized as a click reaction for grafting of acid-terminated alkynes to thiol-terminated monolayers on a gold substrate to create stable, low-density monolayers. The resulting monolayers are compared with a well-packed 11-mercaptoundecanoic acid monolayer and the analogous low-density monolayers prepared through a solution phase synthetic approach. The overall structuring of the monolayer prepared by solid-phase grafting is characterized by contact angle goniometry and Fourier transform infrared spectroscopy. The results show that the product monolayer has an intermediate surface energy and a more disordered chemical structuring compared to a traditional well-packed self-assembled monolayer, showing a low-packing density of the chains at the monolayer surface. The monolayer's structure and electrochemical stability were studied by reductive desorption of the thiolates. The prepared low-density monolayers have a higher electrochemical stability than traditional well-packed monolayers, which results from the crystalline structure at the gold interface. This technique allows for simple, fast preparation of low-density monolayers of higher stability than well-packed monolayers. The use of a photomask to restrict light access to the substrate yielded these low-density monolayers in patterned regions defined by light exposure. This general thiol-yne approach is adaptable to a variety of analogous low-density monolayers with diverse chemical functionalities.