Format

Send to

Choose Destination
Sci Rep. 2015 Jan 28;5:8072. doi: 10.1038/srep08072.

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining.

Author information

1
1] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China [2] University of Chinese Academy of Sciences, Beijing 100049, China.
2
State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China.
3
1] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China [2] School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China.
4
State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.

Abstract

We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

Supplemental Content

Full text links

Icon for Nature Publishing Group Icon for PubMed Central
Loading ...
Support Center