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Nanoscale. 2014 Aug 21;6(16):9846-51. doi: 10.1039/c4nr01874e.

Broadband antireflection and field emission properties of TiN-coated Si-nanopillars.

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1
Department of Electrophysics, National Chiao Tung University, Hsinchu 300, Taiwan. ymchang7@gmail.com jyjuang@g2.nctu.edu.tw.

Abstract

Broadband antireflection and field emission characteristics of silicon nanopillars (Si-NPs) fabricated by self-masking dry etching in hydrogen-containing plasma were systematically investigated. In particular, the effects of ultrathin (5-20 nm) titanium nitride (TiN) films deposited on Si-NPs by atomic layer deposition (ALD) on the optoelectronic properties were explored. The results showed that by coating the Si-NPs with a thin layer of TiN the antireflection capability of pristine Si-NPs can be significantly improved, especially in the wavelength range of 1000-1500 nm. The enhanced field emission characteristics of these TiN/Si-NP heterostructures suggest that, in addition to the reflectance suppression in the long wavelength range arising from the strong wavelength-dependent refractive index of TiN, the TiN-coating may have also significantly modified the effective work function at the TiN/Si interface as well.

PMID:
25029029
DOI:
10.1039/c4nr01874e
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