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ScientificWorldJournal. 2014 Feb 11;2014:281954. doi: 10.1155/2014/281954. eCollection 2014.

Formation of three-way scanning electron microscope moiré on micro/nanostructures.

Author information

1
Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan.
2
Hybrid Materials Unit, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan.

Abstract

Three-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM. The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular manner. The deformation and the structure information of the specimen grating in three directions can be simultaneously obtained from the three-way SEM moiré. The design considerations of the three-way EB were discussed. As an illustration, the three-way SEM moiré spots produced on a silicon slide were presented. The proposed three-way SEM moiré method is expected to characterize micro/nanostructures in triangular or hexagonal arrangements in three directions at the same time.

PMID:
24688377
PMCID:
PMC3944902
DOI:
10.1155/2014/281954
[Indexed for MEDLINE]
Free PMC Article
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