Parametric nonlinear lumped element model for circular CMUTs in collapsed mode

IEEE Trans Ultrason Ferroelectr Freq Control. 2014 Jan;61(1):173-81. doi: 10.1109/TUFFC.2014.6689785.

Abstract

We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed membrane operation. The radiation impedance for collapsed mode is also included in the model. The model is merged with the uncollapsed mode model to obtain a simulation tool that handles all CMUT behavior, in transmit or receive. Large- and small-signal operation of a single CMUT can be fully simulated for any excitation regime. The results are in good agreement with FEM simulations.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer Simulation
  • Computer-Aided Design*
  • Electric Capacitance
  • Electronics / instrumentation*
  • Equipment Design
  • Equipment Failure Analysis
  • Miniaturization
  • Models, Theoretical*
  • Nonlinear Dynamics
  • Transducers*
  • Ultrasonography / instrumentation*