In situ synthesis of large-area single sub-10 nm nanoparticle arrays by polymer pen lithography

In order to take advantage of the unique properties of nanoparticles in integrated devices, it is desirable to position monodispersed nanoparticles on substrates with controlled placement. Herein, we utilize small molecules such as ethylene glycol (EG) or glycerol to facilitate the delivery of nanoparticle precursors to the substrates in the polymer pen lithography (PPL) process. Subsequently, large-area ordered single nanoparticle arrays, including sub-10 nm Ag nanoparticle, 30 nm Au nanoparticle and 80 nm Fe2O3 nanoparticle arrays have been synthesized in situ with controllable sizes and pitches.