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J Nanosci Nanotechnol. 2013 Nov;13(11):7756-9.

Index-matched indium tin oxide electrodes for capacitive touch screen panel applications.

Author information

1
Electronics and Telecommunications Research Institute, Yuseong-gu, Daejeon, 305-700, Korea.

Abstract

Index-matched indium tin oxide (ITO) electrodes for capacitive touch screen panels have been fabricated to improve optical transmittance and reduce the difference of reflectance (deltaR) between the etched and un-etched regions. 8.5 nm Nb2O5 and 49 nm SiO2 thin films were deposited by magnetron sputtering as index-matching layers between an ITO electrode and a glass substrate. In case of 30 nm ITO electrode, a 4.3% improvement in the optical transmittance and a deltaR of less than 1% were achieved, along with a low sheet resistance of 90 omega/square.

PMID:
24245328
[Indexed for MEDLINE]

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