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Opt Express. 2013 Sep 23;21(19):21970-80. doi: 10.1364/OE.21.021970.

Full field tabletop EUV coherent diffractive imaging in a transmission geometry.

Abstract

We demonstrate the first general tabletop EUV coherent microscope that can image extended, non-isolated, non-periodic, objects. By implementing keyhole coherent diffractive imaging with curved mirrors and a tabletop high harmonic source, we achieve improved efficiency of the imaging system as well as more uniform illumination at the sample, when compared with what is possible using Fresnel zone plates. Moreover, we show that the unscattered light from a semi-transparent sample can be used as a holographic reference wave, allowing quantitative information about the thickness of the sample to be extracted from the retrieved image. Finally, we show that excellent tabletop image fidelity is achieved by comparing the retrieved images with scanning electron and atomic force microscopy images, and show superior capabilities in some cases.

PMID:
24104090
DOI:
10.1364/OE.21.021970
[Indexed for MEDLINE]

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