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Opt Express. 2013 Jul 15;21(14):16882-7. doi: 10.1364/OE.21.016882.

High Q SiC microresonators.

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1
School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA.

Abstract

We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a 20 μm radius suspended microring resonator with Q=14,100 fabricated on commercially available SiC-on-silicon substrates.

PMID:
23938536
[Indexed for MEDLINE]
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