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J Am Chem Soc. 2013 May 8;135(18):6778-81. doi: 10.1021/ja401785h. Epub 2013 Apr 25.

Nanoscale growth and patterning of inorganic oxides using DNA nanostructure templates.

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Department of Chemistry, University of Pittsburgh, Pittsburgh, Pennsylvania 15260, United States.


We describe a method to form custom-shaped inorganic oxide nanostructures by using DNA nanostructure templates. We show that a DNA nanostructure can modulate the rate of chemical vapor deposition of SiO2 and TiO2 with nanometer-scale spatial resolution. The resulting oxide nanostructure inherits its shape from the DNA template. This method generates both positive-tone and negative-tone patterns on a wide range of substrates and is compatible with conventional silicon nanofabrication processes. Our result opens the door to the use of DNA nanostructures as general-purpose templates for high-resolution nanofabrication.

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