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Opt Express. 2013 Feb 11;21(3):2807-15. doi: 10.1364/OE.21.002807.

Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control.

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Department of Mechanical and Aerospace Engineering, University of California, Davis, One Shields Ave., Davis, California 95616, USA.


We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing.

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