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Opt Express. 2012 Oct 8;20(21):23832-7. doi: 10.1364/OE.20.023832.

THz quantum cascade lasers with wafer bonded active regions.

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Photonics Institute and Center for Micro- and Nanostructures, Vienna University of Technology, Gusshausstrasse 29, A-1040 Vienna, Austria.


We demonstrate terahertz quantum-cascade lasers with a 30 μm thick double-metal waveguide, which are fabricated by stacking two 15 μm thick active regions using a wafer bonding process. By increasing the active region thickness more optical power is generated inside the cavity, the waveguide losses are decreased and the far-field is improved due to a larger facet aperture. In this way the output power is increased by significantly more than a factor of 2 without reducing the maximum operating temperature and without increasing the threshold current.

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