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Opt Express. 2012 Nov 19;20(24):26345-50. doi: 10.1364/OE.20.026345.

Improving CMOS-compatible Germanium photodetectors.

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1
Oracle Labs, Oracle, San Diego, California 92121, USA. glenn.li@oracle.com

Abstract

We report design improvements for evanescently coupled Germanium photodetectors grown at low temperature. The resulting photodetectors with 10 μm Ge length manufactured in a commercial CMOS process achieve >0.8 A/W responsivity over the entire C-band, with a device capacitance of <7 fF based on measured data.

PMID:
23187489
[Indexed for MEDLINE]
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