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Opt Express. 2012 Sep 24;20(20):21917-23. doi: 10.1364/OE.20.021917.

Narrowband multispectral filter set for visible band.

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School of Engineering, University of Glasgow, Glasgow G12 8LT, UK.


We design, fabricate and characterise a narrowband Fabry-PĂ©rot multispectral filter set for the visible range (400-750 nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mirrors to create 23 filters with full-width half-maximums of 22-46 nm. Additionally, for colourmetric reproduction applications, using as few as 10 filters gives a colour difference (CIEDE2000) of 0.072, better than trichromatic filters.

[Indexed for MEDLINE]

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